— Product portfolio

Products used in Electronics Micro Lithography

DNQ building blocks for g-line and i-line positive photoresists.

From the 2-1-4 sodium salt and DNQ-THBP ester building blocks to Orion P-1403, P-1610 and P-3101 grades for spin-coated wafer photoresists.

SODIUM SALT CAS 64173-96-2

Orion Freedom 2-1-4 — Sodium Salt

2-Diazo-1-naphthol-4-sulphonic acid · sodium salt

The core water-soluble DNQ salt — a main building block for DNQ-based coating solutions used to manufacture electronic photoresists and converted into sulphonyl chloride for further esterification.

Appearance
Yellow powder
Assay
98.0% min
Moisture
2.5%
M.W.
272.21 g/mol
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BUILDING BLOCK Complex polymer

DNQ-THBP 2-2-4-4 Building Block

Diazonaphthoquinone · tetrahydroxy benzophenone (THBP) ester

DNQ-THBP is the industry-standard photoactive compound (PAC) for positive-tone g-line (436 nm) and i-line (365 nm) microlithography. Novolak resin acts as the base matrix; THBP esterified with DNQ functions as the PAC. Orion supplies this building block alongside Orion P-1403, P-1610 and P-3101 grades.

System
Positive-tone DNQ-THBP
Exposure
G-line (436 nm) · I-line (365 nm)
Resin ratio
3.0–3.5 parts novolak : 1 part PAC
Resolution
> 0.5 μm (g-line) · 0.35–0.25 μm (i-line)
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ORION P-1403 Complex polymer

Orion P-1403

DNQ-THBP ester · dry powder · g-line / i-line photoresist

Orion P-1403 is a yellow to yellow-brown DNQ-THBP building block supplied as dry powder. Blend with your choice of cresol novolak resin at 3.0–3.5 parts resin to one part P-1403 for spin-coated g-line or i-line positive photoresists.

Appearance
Yellow to yellow-brown powder
Form
Dry powder
Resin ratio
3.0–3.5 : 1 novolak : P-1403
Exposure
G-line or I-line UV
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ORION P-3101 Complex polymer

Orion P-3101

DNQ-THBP ester · 20% solids ready liquid · g-line / i-line photoresist

Orion P-3101 is a ready-to-use 20% solids DNQ-THBP coating solution for g-line and i-line positive photoresists. Solvents and resin are pre-selected — spin-coat directly without in-house dissolution.

Form
20% solids ready liquid
Solids
20%
Exposure
G-line or I-line UV
Coating
Spin coat · 3500–5000 RPM
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ORION P-1610 Complex polymer

Orion P-1610

DNQ-THBP ester · dry powder with matched novolak · g-line / i-line photoresist

Orion P-1610 is a yellow to yellow-brown DNQ-THBP building block supplied as dry powder with a matched novolak resin. Optimised for i-line dominance with sharper contrast and higher resolution than P-1403 alone.

Appearance
Yellow to yellow-brown powder
Form
Dry powder with matched novolak
Resin ratio
3.0–3.5 : 1 novolak : active
Exposure
G-line or I-line UV
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Need a grade, pack size or specification not listed?

We supply DNQ actives and coating systems to printing-plate manufacturers, photoresist makers and trade buyers. Tell us your process and target and we'll match a grade.